| 妛撪偺摦偒丂嘥峴帠丒僀儀儞僩
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| 仢丂乽儅僀僋儘儅僔儞乛MEMS揥乿偵弌揥
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| 丂7寧11擔乮悈乯乣13擔乮嬥乯丄搶嫗價僢僌僒僀僩乮搶嫗丒峕搶嬫乯偵偍偄偰丄戞23夞儅僀僋儘儅僔儞乛MEMS揥乮庡嵜乛堦斒嵿抍朄恖儅僀僋儘儅僔儞僙儞僞乕丗MMC乯偑奐嵜偝傟丄杮妛偐傜偼乽旝嵶壛岺嬥懏峔憿懱怗攠傪梡偄偨儅僀僋儘儕傾僋僞乕偵傛傞崅岠棪斀墳僔僗僥儉乿乮烴堜惤岺妛尋媶堾弝嫵庼乯傪弌揥偟丄12擔偵岥摢敪昞偑峴傢傟傑偟偨丅 丂偙偺揥帵夛偼丄悽奅嵟戝婯柾偺MEMS乮儊儉僗丗Micro Electro Mechanical Systems乯丄挻惛枾丒旝嵶壛岺丄僫僲僥僋側偳偺崙嵺尒杮巗偱偡丅MEMS偼丄儅僀僋儘儊乕僞偺僆乕僟乕偺旝彫側峔憿懱傪慻傒崌傢偣偰條乆側擖弌椡傪張棟偡傞婡擻傪帩偪丄懡偔偺儅僀僋儘丒僨僶僀僗偵慻傒崬傑傟偰偄傞傕偺偱丄2010擭偺悽奅巗応偼100壄暷僪儖偵払偡傞偲偄傢傟丄崱屻擔杮偺敿摫懱娭楢嶻嬈傪巟偊傞拰偵側傞偙偲偑婜懸偝傟偰偄傑偡丅 丂崱夞偺夛婜拞偺棃応幰偼3擔娫偱10,985柤乮庡嵜幰敪昞乯傪悢偊傞側偳丄懡偔偺婇嬈偺拲栚傪廤傔偰偄傞尋媶暘栰偱偁傝丄崱屻偺幚梡壔傪栚巜偟偨尋媶惉壥偑婜懸偝傟傑偡丅 |
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| 丂 | ||
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| 岥摢敪昞傪峴偆烴堜弝嫵庼 | 杮妛僽乕僗 | |
| 丂 | ||
| 乹仼慜偺婰帠乺 | 乹師偺婰帠仺乺 | |
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| 523崋栚師傊栠傞 | ||