丂岺妛晎妛惗偑PosterAward 傪庴徿
丂杮崙嵺夛媍偼National Science Council, Taiwan ROC偲National Taiwan University of Science and Technology偺庡嵜偱丄憱嵏宆僾儘乕僽尠旝嬀乮SPM乯傪棙梡偟偨僫僲僗働乕儖壛岺媄弍偺嵟嬤偺惉壥偺斺業偲丄尨巕丒暘巕憖嶌傪棙梡偟偨媶嬌揑側SPM壛岺媄弍傪栚巜偟偨崱屻偺媄弍揥奐傪橂嵴偡傞偙偲傪栚揑偲偟偰弶傔偰奐嵜偝傟傑偟偨丅夛媍偵偼10僇崙埲忋偐傜150柤傪挻偊傞嶲壛幰偑廤偄丄尩慖偝傟偨60審偺惉壥敪昞偑偁傝傑偟偨丅Poster Award偼億僗僞乕敪昞30審偺拞偐傜慖弌偝傟丄庴徿榑暥偼乽10 Micrometer-Scale SPM Local Oxidation Lithography乿偲戣偝傟丄SPM傪梡偄偨僫僲僗働乕儖僨僶僀僗嶌惢媄弍偺敪揥偺堦彆偲側傞傕偺偱偡丅
丂尋媶惉壥偺徻嵶
丂堦斒偵丄SPM偵傛傞嬊強巁壔朄傪梡偄偰扨揹巕僩儔儞僕僗僞側偳偺僫僲僗働乕儖僨僶僀僗偺嶌惢傪峴偆嵺偵偼丄僨僶僀僗娫偺慺巕暘棧椞堟傗僠儍僱儖晹偺揹棳嫹嶓峔憿側偳丄兪m媺偺峀斖埻椞堟偵搉傞僨僶僀僗峔憿懱偺宍惉偑昁梫偲偝傟偰偄傑偡丅悢nm偺嬋棪敿宎傪桳偡傞SPM扵恓傪梡偄偨廬棃宆偺嬊強巁壔朄偱偼丄堦夞偺壛岺偱10-100 nm媺偺峔憿懱傪宍惉偱偒傑偡偑丄兪m媺偺峔憿懱傪嶌惢偡傞偵偼SPM扵恓偺彫偝偝屘偵朿戝側壛岺帪娫偑昁梫偲側傝丄慺巕嶌惢僗儖乕僾僢僩偺掅壓偑栤戣偲側偭偰偄傑偟偨丅
丂杮尋媶偱偼丄愭抂僒僀僘偑兪m媺偺撈帺偺SPM扵恓傪怴偨偵採埬丒嶌惢偟丄僫僲僗働乕儖僨僶僀僗偺嶌惢僗儖乕僾僢僩傪廬棃斾偱侾侽侽侽攞埲忋偵岦忋偝偣傞偙偲偵惉岟偟傑偟偨丅偙傟傛傝丄儅僀僋儘僗働乕儖椞堟偐傜僫僲僗働乕儖椞堟傑偱傪楢懕揑偵庢傝埖偆偙偲偑壜擻偲側傞SPM壛岺媄弍偺奐敪偵惉岟偟傑偟偨丅
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